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Microdefects in heavily phosphorus-doped Czochralski silicon
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發(fā)布日期: 2021-04-10
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重?fù)搅字崩鑶尉У奈⑷毕荩蹑?zhèn)輝,馬向陽,本文研究了重?fù)搅字崩鑶尉е醒醭恋砗土鲃?dòng)圖案兩種微缺陷以及它們之間的相互關(guān)系.兩步法高溫?zé)崽幚碛糜谛纬裳醭恋?研究表明體微?
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Rapid thermal processing phosphorus gettering of multicrystalline silicon
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tal-Phosphorus Bonding in Complexes W@Au12PX3 (X = H F Cl Br I) - Relativistic DFT Investigations
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